Products
Electrostatic chucks
SEMCO electrostatic chucks offer smart solutions for the clamping and processing of thin and ultra-thin wafers.
SEMCO Technologies, expert in electrostatic chucks
Discover our eChucks
SEMCO Technologies has been designing and manufacturing in France innovative electrostatic chucks (ESC) and heating pedestals for the wafer processing industry since 1992.
SEMCO Technologies provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide, directly, or through SEMCO Technologies subsidiaries and service centers.
About our chucks
Technical caracteristics.
Safe and easy handling of semiconductor wafers, flat panel displays, solar cells, etc. Clamping capability of a variety of materials including dielectrics and compounds.
Size
Compatible with substrates from 50-mm to 450-mm diameter.
Process Temperature
Wide operating temperature range between -150°C (-238°F) and +650°C (+1200°F).
Coulombic based technology
For Si and III-V wafers, compatible with non conductive substrates sus as Sapphire, TSV carriers etc.
Electrode Type
Bi-Polar, Multi-Polar.
Wafer Contact Surface
Custom Pattern dedicated to customer’s applications.
Products
Our eChucks.
Electrostatic smart clamping solutions for thin and ultra-thin wafers.
ESCs – Our expertise
SEMCO Technologies offers reliable solutions for clamping and processing of standard, thin and ultra-thin wafers by using proprietary ESC capacitive technology. We also have the ability to manufacture ESC’s that have embedded heaters. Complete set of thermal modelling tools for BSG regulation, optimization of thermal transfer and temperature uniformity control. Optimized backside particle control.
Certifications and qualifications
Our certifications and qualifications.
SEMCO Technologies continously seeks to invest in new manufacturing technologies, research and development and trainings for its teams. We aim at providing the best products and services to our customers and we are commited to meet the highest levels in terms of quality and technicality!
ISO 9001
Project on going – End 2023
COFREND 2
COFREND 2 qualification for leak test calculation
QMOS
Employees and equipment QMOS certified
ISO 7 Cleanroom
All our products are manufactured in ISO 7 cleanroom
Do you have a question or a project ?
For any additional information, our teams are at your disposal. Do not hesitate to contact us to learn more about our products and services.